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射频MEMS及其在相控阵系统中的应用
彭祥龙,石星
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(中国西南电子技术研究所，成都 610036)

摘要:

概述了国内外射频MEMS移相器的研究情况，分析了射频MEMS技术给相控阵系统设计带来的优势如：降低系统功耗，实现宽带阵列、自适应阵列与低成本相控阵等，介绍了国外MEMS相控阵天线实例与毫米波MEMS相控阵系统方案。

关键词: MEMS移相器相控阵系统低成本毫米波

DOI：

基金项目:

RF MEMS and its Application in Phased Array Systems

PENG Xiang-long,SHI Xing

(Southwest China Institute of Electronic Technology, Chengdu 610036, China)

Abstract:

The domestic and overseas progresses in RF MEMS(Micro ElectroMechanical System ) phase shifters are summarized.RF MEMS brings forth great advantages for phased array systems,such as reduction of total power consumption,realization of wideb and arrays,adaptive arrays and lowcost phased arrays. Examples of MEMS phased array antenna and some designs of millimeterwave MEMS phased array are introdu ced.

Key words: MEMS phase shifter phased array system low cost millimeter wave(MMW)