| 摘要: |
| 提出了粗糙表面射频电导轮廓的概念及物理意义,介绍了与射频电导轮廓相关的技术指标和测量、计算方法,对射频电导轮廓在分析计算粗糙表面射频等效电导率、优化射频微波器件加工工艺流程等方面的应用情况进行了简介。实验表明,研究成果与实测数据相吻合。 |
| 关键词: 微波器件,射频电导轮廓,粗糙度,轮廓长度率,等效电导率 |
| DOI：10.3969/j.issn.1001-893X. |
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| 基金项目:国家重点基础研究发展计划(973计划) |
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| The Concept and Application of RF Conductance Profile |
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| Abstract: |
| This paper proposes the concept and physics meanings of RF conductance profile of rough surface, then describes the technical specifications, measurement and calculation methods of RF conductance profile. Finally it introduces the application of RF conductance profile in analyzing and calculating the rough surface RF equivalent conductivity and optimizing the technical process of RF microwave devices. The experiment shows that the research results match the test data. |
| Key words: microwave device,radio frequency conductance profile,surface roughness,profile length ratio,equivalent conductivity |
