| 摘要: |
| 介绍了低损耗高Q值声表面瑞利波和声表面横波谐振器的原理、结构、制作和关键的设计参数，以及实验结果。其中双端声表面瑞利波谐振器的有载Q值可达5000以上，无载Q值可达20000以上。 |
| 关键词: Q值 声表面波谐振器 低损耗 原理 实验结果 高Q 横波 |
| DOI：10.3969/j.issn.1001-893X. |
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| 基金项目: |
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| Surface Acoustic Wave Rasonators with Low Loss and High Q Factor |
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| Abstract: |
| This paper introduces the theory,structure,manufacture, key design parameters, and experiment result of surface acoustic Rayleigh wave and surface transverse wave rasonators.The load Q of two-port surface acoustic Rayleigh wave rasonators can reach more than 5 000,and unload more than 20 000. |
| Key words: SAW devices,Rasonator,Quality factor(Q factor),Loss |
