| 摘要: |
| 本文通过在工艺实践中的经验及革新的思路，介绍了高精度制版的工艺方法。实现了利用现有设备进行毫米波基片制版，取得了较好的效益。 |
| 关键词: 高精度制版工艺 毫米波 集成电路 |
| DOI：10.3969/j.issn.1001-893X. |
| Revised:November 28, 2000 |
| 基金项目: |
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| Technology of Accurate Plate Making for Millimeter Wave Chip |
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| Abstract: |
| Through the experience in practice and the thought of innovation,the technology of accurate plate rnaking is introduced.With the existing equipment,millimeter plate making is realized with satisfying benifits. |
| Key words: Accurate plate making,Technology |
