| 摘要: |
| 本文分析了在3mm波基片精蚀工艺研究中发现的问题和解决问题的办法，找出了一条利用现有微波生产设备进行毫米波基片研制的途径。 |
| 关键词: 毫米波工艺 毫米波基片 精蚀工艺 微电子 |
| DOI：10.3969/j.issn.1001-893X. |
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| 基金项目: |
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| The Research for 3 mm Wave Circuit Thin Piece About Accurate Etching Techndogy |
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| Abstract: |
| This article analysed the problems that werefonnd in the accurate etching technological research for three-millimeter wave circuit and have found the process to solve the problems.Wehave fonml a process that make use of the present instruments of microwave manufactnre to develop new base thin piece for millimeter wave circuit ancl have obtained a nice economic and social bemmifits. |
| Key words: Millimeter wave technology,The base thin piece for millimeter wave circuit,Accurate etching process, |
