| 摘要: |
| 微电子机械系统(MEMS)技术在通信领域中有着广泛的应用前景，本文介绍了在无线通信和光通信中的MEMS器件如MEMS电感、电容、开关、滤波器、光检测器等MEMS器件的原理、结构和发展概况，指出了MEMS器件发展所面临的问题和方向。 |
| 关键词: MEMS 微电子机械系统 无线通信 光通信 滤波器 光检测器 电感 电容 |
| DOI：10.3969/j.issn.1001-893X. |
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| 基金项目: |
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| The Application and Development of MEMS Device in Communication Field |
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| Abstract: |
| Micro Electro Mechanical Systems ( MEMS ) technology have extensive application prospect in the field of communication. This paper introduces the principle,structure and general situation of the MEMS device in wireless communication and the optical fiber communication, such as MEMS inductance, capacity, switch, wave filter and smooth detector,and also points out the problems and direction faced by MEMS device development in the future . |
| Key words: Wireless communication,Optical fiber communication,MEMS,MOEMS |
《电讯技术》编辑部 